AIS2300C

High magnification SEM. Wide FOV and ultra pixel resolution. Designed for automation and large samples.

• Status: Active
• Country: South Korea
• Electron gun type : W Thermionic source
• Standard detectors : ET-Type SE Detector (SE-BSE mode)
• Optional detectors : BSE, CCD, TSEM
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Particle Counter, Blob Analysis, 3D-View, AOI, Histogram
• Electron optics : Electromagnetic Lens System
• Resolution : 3.0 nm @ 30kV SE, 4.0 nm BSE
• Accelerating voltage : 0.6 – 30kV (min. 0.2kV)
• Image parameters : Area Mode(640×480), up to 8192×6144
• Magnification : 10× – 1,000,000×
• Chamber : Optional large stage & chamber
• Camera details : Optional CCD
• Stage parameters : X/Y/Z: 60/70/65 mm; Tilt: -20° to 60° (max. 90°); Rotation: 360° Endless
• Vacuum system : Rotary + Turbo Pump; High vacuum; Low vacuum (optional)
• Power Requirements and Consumption : 220–230V AC, 5KW, 50/60Hz
• Environmental requirements : 22±2°C, Humidity < 70%
• Vibration, Magnetic, Noise tolerance : 3μm/sec @ 5–10Hz; EMI compliant