EM8100

Schottky FEG SEM with 0.9nm resolution at 30kV. Includes motorized five-axis stage and large sample capacity. Features low-aberration optics and detector expandability.

• Status: Active
• Country: China
• Electron gun type : Schottky FEG
• Standard detectors : High Vacuum SE Detector; Infrared CCD Camera; Optical Navigation; Four segmentation retractable Backscatter Detector
• Optional detectors : EDS; EBSD; STEM; CL
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS; EBSD; STEM; CL
• Electron optics : Lens barrel acceleration technology; low-aberration conical objective lens
• Resolution : SE: 0.9nm@30kV, 3nm@1kV
• Optical column : Low-aberration conical objective lens
• Electron beam resolution : SE: 0.9nm@30kV, 3nm@1kV
• Accelerating voltage : 0.2kV–30kV
• Magnification : 1x–3000000x; Optical magnification 1x–100x
• Chamber : Multiple interface at chamber
• Camera details : Infrared CCD Camera; Optical Navigation
• Stage parameters : Five-axis Automatic Stage: X=150mm, Y=150mm, Z=65mm, T=-10° to +90°, R=360°
• Sample size: Max Diameter: 320mm; Max Height: 90mm
• Cooling system : Optional
• Vacuum system : 1 Sputter Ion Pump, 1 Getter Ion Combined Pump, 1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump