CX-200Plus

Tabletop SEM with NanoStation 4.0 GUI. Features include dual display, signal mixing, auto functions, and STEM capabilities

• Status: Active
• Country: South Korea
• Electron gun type : W Thermionic source
• Standard detectors : SED, BSED
• Optional detectors : CL, EDS (Oxford/Bruker), EBSD, WDS, STEM (BF, DF), Nanomanipulators, Cool Stage
• Cryo : Optional
• STEM : Yes
• STEM parameters: 4 TEM grid holders; BF and DF selectable modes
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, STEM, nanoprobe manipulation, LayerProbe for thin film analysis
• Electron optics : Signal mixing, SE + BSE dual mode, chamber scope, panoramic imaging, eucentric 5-axis motorized stage
• Resolution : SE: 3.0 nm @ 30 kV; SE: 8.0 nm @ 3 kV; BSE: 4.0 nm @ 30 kV
• Electron beam resolution : 3.0–8.0 nm depending on mode
• Accelerating voltage : 1–30 kV
• Image parameters : Dual display, signal mixing, auto focus/B/C, panorama stitching, chamber scope
• Magnification : ×15 – ×300,000 (digital zoom ×2, ×4)
• Chamber : Observation area Ø70 mm; max height 55 mm
• Camera details : Chamber Scope camera, STEM camera
• Stage parameters : 5-axis motorized: X/Y: 0–60 mm; Z: 5–60 mm; R: 360°; T: –20° to +90°; eucentric stage
• Holder Types : Multi-sample; STEM grid holders (4 TEM grids)
• Sample size: Max specimen size: Ø160 mm
• Cooling system : Optional Cool Stage
• Vacuum system : Turbo (80L) + Rotary (100L); high, low, and variable pressure modes
• Power Requirements and Consumption : 110V/220V, 50/60Hz, 1 kVA
• Environmental requirements : 20°C ±5°C, <70% RH, noise <60 dB, vibration <35 dB, magnetic field <0.5 mG
• Vibration, Magnetic, Noise tolerance : <35 dB vibration, <0.5 mG magnetic, <60 dB noise