Crossbeam 350

SEM-FIB with variable pressure for flexible in situ experiments. Combines FE-SEM imaging with Ion-sculptor FIB for fast, low-damage 3D analytics and TEM prep

• Status: Active
• Country: Germany
• Electron gun type : Schottky FEG
• Standard detectors : Inlens SE, Inlens EsB, VPSE, SESI, aSTEM, aBSD
• Optional detectors : EDS, EBSD, WDS, SIMS, ToF-SIMS
• Cryo : Optional
• FIB: Yes
• STEM : Yes
• STEM parameters: aSTEM detector for BF, DF, HAADF
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : 3D EDS, 3D EBSD, Atlas 5 tomography, SmartEPD, ToF-SIMS, Raman (via CCD)
• Electron optics : Gemini VP column with Inlens SE and EsB detectors; single condenser
• Resolution : 0.9 nm at15 kV; 1.7 nm at1 kV with Tandem decel; 1.9 nm at200 V with Tandem decel
• Optical column : Gemini VP with beam booster and optional VP
• Electron beam resolution : 0.7–2.3 nm depending on mode and voltage
• Beam current : 5 pA – 100 nA
• Image parameters : 3D tomography, multi-detector simultaneous imaging, high contrast SE and BSE, Atlas 5 support
• Magnification : Up to 50k × 40k pixels with Atlas 5
• Chamber : 18 configurable ports (standard)
• Camera details : Optional airlock navigation camera
• Stage parameters : X/Y: 100 mm, Z: 50 mm, Tilt: –4° to +70°, Rotation: 360°, Z′: 13 mm
• Holder Types : Compatible with standard, heating, cryo, aSTEM, etc.
• Vacuum system : FIB: LMIS Ga source, lifetime >3000 µAh; dry pumping; optional variable pressure