Veritas SEM

Large chamber SEM optimized for productivity, multi-sample analysis, and remote support

• Status: Active
• Country: USA
• Electron gun type : W Thermionic source
• Standard detectors : SE Detector (ET-type), BSE Detector (4-channel, semiconductor)
• Optional detectors : EDS, EBSD, WDS, CL, Raman, 3D Imaging, E-beam Lithography, Chamber Camera
• Cryo : Optional
• STEM : Optional
• STEM parameters: BF/DF; 4-channel detector
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL, Raman, E-beam Lithography, 3D Imaging
• Electron optics : Large chamber optics with long stage and navigation camera
• Resolution : 3.0 nm (SE), 5.0 nm (BSE)
• Electron beam resolution : 3.0–5.0 nm
• Accelerating voltage : 200 V – 30 kV
• Image parameters : Focus, preview, slow, and photo modes; 3200×2400 max; auto brightness/focus/filament
• Magnification : ×10 – ×300,000
• Chamber : Horizontal: 210 mm; Vertical: 65 mm
• Camera details : Internal CCD camera, navigation function
• Stage parameters : 5-axis Motorized: X/Y: 120 mm, Z: 5–65 mm, Tilt: –20° ~ +90°, Rotation: 360°
• Holder Types : Specimen mounts provided
• Sample size: Horizontal: 210 mm, Vertical: 65 mm
• Aberration Correction type : Low aberration design via optics
• Vacuum system : Turbo pump + rotary vane pump, auto valve system; vacuum ready in 3 minutes
• Power Requirements and Consumption : 100 – 240 VAC, 50/60 Hz, 1 kVA
• Vibration, Magnetic, Noise tolerance : Optional vibration-reducing platform
• Dimensions and Weight: 800 × 825 × 1500 mm, 200 kg (main); 454 × 134 × 212 mm, 22 kg (pump)