EM8010

Schottky FEG SEM with 0.8nm SE resolution at 15kV. Features Inlens detector and deceleration stage. Supports 320mm sample diameter and automated five-axis stage.

• Status: Active
• Country: China
• Electron gun type : Schottky FEG
• Standard detectors : Inlens detector
• Cryo : Optional
• Electron optics : Electro-optical design with low aberration objective lens
• Resolution : 0.8nm@15kV, 1.5nm@1kV
• Optical column : Low aberration objective lens
• Electron beam resolution : 0.8nm@15kV
• Accelerating voltage : 0.2kV–30kV
• Image parameters : Integrates extensive image processing functions
• Magnification : 1x–3000000x
• Stage parameters : Five Axes Eucentric Auto Stage: X:0–150mm, Y:0–150mm, Z:0–65mm, R:360°, T:-10° to 90°
• Sample size: Max diameter: 320mm; Max height: 90mm
• Aberration Correction type : Low aberration objective lens (mentioned)