SEM5000Pro

High-res FE-SEM with SuperTunnel optics, low aberration, magnetic-free imaging, and automated UI

• Status: Active
• Country: China
• Electron gun type : Schottky FEG
• Standard detectors : In-lens detector, ETD
• Optional detectors : BSED (retractable), STEM, EDS, EBSD, Loadlock
• STEM : Optional
• STEM parameters: Retractable, large FOV STEM
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, 3D analysis
• Electron optics : SuperTunnel optics, electromagnetic/electrostatic lens, no crossover design
• Resolution : 0.8 nm @ 15 kV (SE), 1.2 nm @ 1 kV (SE)
• Optical column : No crossover column; SuperTunnel path
• Electron beam resolution : 0.8–1.2 nm depending on mode
• Accelerating voltage : 0.02–30 kV
• Image parameters : Auto image, navigation, brightness, stigmator
• Magnification : 1× – 2,500,000×
• Chamber : Loadlock optional; X/Y=110 mm, Z=50 mm
• Camera details : Dual cameras
• Stage parameters : 5-axis eucentric: X/Y=110 mm, Z=50 mm
• Aberration Correction type : SuperTunnel reduces aberrations, no crossover
• Cooling system : Water-cooled lens (for thermal control)
• Vacuum system : Oil-free, auto; low-vacuum option
• Vibration, Magnetic, Noise tolerance : Optional anti-vibration platform