VELION

Multi-ion-species FIB-SEM nanofabrication system with laser interferometer stage. Supports unattended, ultra-precise large-area patterning and in-situ SEM metrology

• Status: Active
• Country: Germany
• Standard detectors : FE-SEM column; in-situ process monitoring via SEM and EDX
• Optional detectors : SEM, EDX, EBIC, EBAC, Resistive Contrast Imaging, GIS, nanomanipulators
• FIB: Yes
• STEM : Yes
• STEM parameters: High-resolution 3D ion-STEM imaging, lithium ion contrast imaging
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Multi-species FIB, GIS, EDX, EBIC/EBAC, CAD navigation, large-area write-field stitching, 3D ion microscopy
• Electron optics : Vertically mounted nanoFIB column, low-kV FE-SEM column for in-situ SEM, 4" laser interferometer stage
• Resolution : Sub-10 nm FIB resolution
• Optical column : nanoFIB ion column with Wien filter; field-free SEM column
• Accelerating voltage : - (multi-ion FIB with dynamic control)
• Image parameters : In-situ SEM metrology, live process monitoring, automated large-area FIB imaging with CAD overlay
• Magnification : Sub-nm to cm patterning scale; - in × units
• Chamber : 100 mm × 100 mm sample area, laser-corrected sample height adjustment
• Camera details : SEM imaging; large-area mosaic imaging with light ions
• Stage parameters : 4" laser interferometer-controlled stage; sub-nm precision; automatic correction for sample tilt/bow
• Holder Types : Multiple universal holders and nanomanipulators
• Sample size: 4" (100 mm × 100 mm) sample area
• Aberration Correction type : Dynamic beam corrections, distortion-free write-field calibration
• Cooling system : Environmental enclosure for lab adaptation
• Vacuum system : High vacuum with gas injection and laser focus correction
• Environmental requirements : Environmental enclosure adaptable to any lab setting
• Vibration, Magnetic, Noise tolerance : Laser interferometer-controlled stage for high stability