IONMASTER

High-resolution magnetic sector SIMS for nanoanalytics and ion microscopy.

• Status: Active
• Country: Germany
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: All detectable isotopes and elements
• Analyzer type : Magnetic Sector MS
• Ion source type: Liquid Metal Alloy Ion Source (LMAIS)
• Inlet types: Direct solid surface analysis
• High Resolution : Yes
• Sensitivity : < 10 ppm
• Dynamic range : 10⁷
• Detector type : Continuous focal plane detector
• Primary beam : Multiple ion species (light/heavy/reactive) from LMAIS
• Voltage : 35 kV (e.g. Au⁺ primary beam)
• Spatial resolution : < 20 nm SIMS imaging; ≤ 5 nm SE imaging
• Depth profile : Yes (with 3D SIMS reconstruction and layer-by-layer milling)
• Beam energy : Up to 35 kV
• Camera : Yes (SE imaging, beam tuning, CAD navigation)
• Geometry type : Magnetic sector SIMS with MagSIMS optics
• Focusing type : Optimized ion optics and laser interferometer-based positioning