Compact SIMS

Compact Secondary Ion Mass Spectrometer for characterization of layered structures, surface contamination, and impurities. Capable of isotopic analysis across the periodic table with nanometer depth resolution and surface imaging capabilities. Includes 3D profiling and SNMS functionality.

• Status: Active
• Country: UK
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: Positive ions, negative ions, molecules, and isotopes
• Analyzer type : Magnetic Sector MS
• Ion source type: Integral SNMS ion source Electron Impact 4 - 150 eV
• Inlet types: Rotary carousel for loading up to 10 samples
• Mass range : 510 amu standard, 300 and 1000 amu optional
• Sensitivity : > 3 106 c/s nanoamp
• Detection limits : Sub-ppm levels
• Detector type : MAXIM-600P detector
• Primary beam : Oxygen (O2+) or Cesium (Cs+)
• Voltage : Up to 5 keV
• Spatial resolution : Nanometer-scale resolution
• Depth profile : Nanometer depth resolution
• Beam energy : 1–5 keV
• Geometry type : Single-focusing ion optics
• Vacuum system : Dry-pumped vacuum chamber
• Gas supply: Oxygen, cesium, or inert gases
• Power Requirements and Consumption : Single-phase power supply, <10 A at 220 V