M6

Time-of-Flight Secondary Ion Mass Spectrometer with advanced ion beam technology. Features high lateral resolution. Offers versatile applications in 3D chemical imaging, depth profiling, and nanomaterial analysis.

• Status: Active
• Country: Germany
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: Covers isotopes across the periodic table, organic and inorganic species
• Analyzer type : Time-of-Flight MS
• Ion source type: Nanoprobe 50 bismuth cluster ion source, Cs+ source, O2+ source
• Inlet types: Ultra-high vacuum chamber with automated sample handling
• High Resolution : Yes
• Mass resolution/ Mass resolving power : >30,000
• Sensitivity : Up to three times higher sensitivity due to enhanced extraction optics
• Dynamic range : 7 orders of magnitude
• Detection limits : Sub-ppm levels
• Detector type : Microchannel plate detector with phosphor screen and time-to-digital converter
• Primary beam : Bi3+, Cs+, O2+, Gas Cluster Ion Source (GCIB)
• Voltage : Up to 30 kV
• Spatial resolution : <50 nm
• Depth profile : Depth resolution <1 nm
• Beam energy : Adjustable up to 30 keV
• Camera : High-resolution CCD camera for sample visualization
• Geometry type : Single-focusing reflectron TOF geometry
• Focusing type : Electrostatic focusing
• Cooling system : Closed-loop liquid nitrogen cooling system
• Vacuum system : Ultra-high vacuum with dry pumps
• Gas supply: Argon, oxygen, cesium, and inert gases