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AKONIS

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Secondary Ion Mass Spectrometry

Specifications

  • Category: Inorganic and Isotopic Mass Spectrometry
  • Technique: Secondary Ion Mass Spectrometry
  • Manufacturer: CAMECA
  • Country: France
  • Available: Active
All specifications
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About

Short description

Fully automated SIMS for high-volume semiconductor manufacturing.

Specifications

Fully automated SIMS for high-volume semiconductor manufacturing.

  • Status: Active
  • Country: France
  • Isotopic: Yes
  • Elemental: Yes
  • Type of measurable elements: Most of elements, isotopes, and molecular species
  • Analyzer type : Magnetic Sector MS
  • High Resolution : Yes
  • Dynamic range : Up to 5 decades
  • Detection limits : ≤ 10e14 atom/cm3
  • Precision : < 1%
  • Spatial resolution : < 1 nm/decade

Articles

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