AutoSIMS

Fully automated, programmable SIMS system for depth profiling and contamination analysis.

• Status: Active
• Country: UK
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: B, P, As, Si, Mg, Be, H, O, etc.
• Analyzer type : Quadrupole MS (single)
• Ion source type: IG5C Cs⁺ and IG20 O₂⁺ ion guns
• Inlet types: Direct solid sample loading with rotary carousel
• Mass range : 1–2000 amu
• Sensitivity : ~10¹⁷ atoms/cm³ (Si in GaAs); ppb–ppm range
• Dynamic range : 10⁶
• Detection limits : Down to 2×10¹⁶ atoms/cm³ for light elements (e.g., B, Be)
• Precision : Typically <1%
• Primary beam : Cs⁺ and O₂⁺ (1–5 keV)
• Voltage : 1–5 keV
• Spatial resolution : ~50–80 µm (limited by beam spot and raster size)
• Vacuum system : UHV, differential pumping, dry pumps, bakeable
• Power Requirements and Consumption : 2500 W, single phase