SEM4000X

Analytical FE-SEM with Schottky emitter, 3-stage lens, low-vacuum capability, magnetic sample imaging

• Status: Active
• Country: China
• Electron gun type : Schottky FEG
• Standard detectors : Low-angle lateral SE detector
• Optional detectors : LVD, BSE, STEM, EDS, EBSD
• STEM : Optional
• STEM parameters: STEM detector optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, STEM
• Electron optics : Three-stage magnetic lens, leak-free objective design
• Resolution : 1.0 nm @ 30 kV (SE)
• Optical column : Three-stage magnetic lens
• Electron beam resolution : 1.0 nm @ 30 kV
• Beam current : Adjustable wide beam current
• Accelerating voltage : 200 V – 30 kV
• Image parameters : Auto contrast, brightness, astigmatism correction
• Magnification : 1× – 1,000,000×
• Camera details : Dual cameras (navigation + monitoring)
• Stage parameters : X=120 mm, Y=115 mm, Z=50 mm, T=–10° to +90°, R=360°
• Aberration Correction type : Leak-free objective lens
• Vacuum system : Auto; optional low vacuum 180 Pa