Helios 5 Hydra

DualBeam with switchable PFIB species (Xe, Ar, O, N); Ga-free sample prep and 3D characterization; High-throughput, multi-modal system

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : TLD-SE/BSE, ICD, ETD, ICE, IR, Nav-Cam, DBS
• Optional detectors : STEM 3+, EDS, EBSD, WDS
• Cryo : Yes
• FIB: Yes
• STEM : Yes
• STEM parameters: BF, DF, HAADF segments
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, AutoTEM 5, AS&V4
• Electron optics : Elstar SEM Column, magnetic immersion lens, UC+ monochromator
• Resolution : 0.6 nm at 15 kV; 1.2 nm at 1 kV; 0.7 nm at 1 kV; 1.0 nm at 500 V
• Optical column : Elstar SEM Column with SmartAlign, ConstantPower lens
• Beam current : Electron: 0.8 pA – 100 nA; Ion: 1.5 pA – 2.5 µA
• Accelerating voltage : SEM: 350 V–30 kV; FIB: 500 V–30 kV
• Image parameters : 25 ns – 25 ms/pixel; up to 6144×4096 px; DCFI, SmartScan
• Chamber : 21 ports; 379 mm width; Integrated plasma cleaner
• Camera details : IR camera; In-chamber Nav-Cam Camera
• Stage parameters : 5-axis motorized with piezo XYR; XY: 150 mm; Tilt: -38°/+60°
• Holder Types : Multi-purpose, vise, UMB, wafer/custom
• Sample size: Up to 150 mm with full rotation
• Cooling system : CryoMAT; 4-day cold trap
• Vacuum system : Oil-free; <2.6×10⁻⁶ mbar; evac <5 min
• Environmental requirements : Acoustic enclosure reduces sensitivity
• Vibration, Magnetic, Noise tolerance : DCFI; SmartAlign; integrated cleaning