Prisma E SEM

Tungsten SEM with ESEM and ChemiSEM; Optimized for multi-user labs; Live elemental and topographic data

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : ETD, GSED, LVD, DBS, IR, Nav-Cam, STEM 3+
• Optional detectors : ESEM-GAD, RGB-CLD, WetSTEM
• Cryo : Optional
• STEM : Optional
• STEM parameters: STEM 3+ detector (BF, DF, HADF, HAADF)
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL, Raman
• Electron optics : Thermal emission with tetrode dual-anode, 45° lens, differential pumping
• Resolution : 3.0 nm at 30 kV (SE); 8.0 nm at 3 kV (SE); 10 nm at 3 kV in low vacuum
• Optical column : Thermal emission SEM column
• Electron beam resolution : 3.0 nm at 30 kV (SE); 7.0 nm at 3 kV (BD); 10 nm at 3 kV (LVD)
• Beam current : Up to 2 µA, continuously adjustable
• Accelerating voltage : 200 V – 30 kV
• Image parameters : 50 ns – 25 ms/pixel; up to 6144×4096 px
• Magnification : 5× to 1,000,000× (Polaroid)
• Chamber : 340 mm width; 12 ports; 10 mm WD; EDS take-off 35°
• Camera details : IR camera, Nav-Cam Camera
• Stage parameters : Supports samples >200 mm height at 90° tilt
• Holder Types : 19 stubs; 3 pre-tilted; STEM grids; wafer/custom
• Sample size: 122 mm diameter; larger with restricted stage travel
• Cooling system : System chiller
• Vacuum system : Oil-free; 250 l/s TMP; ESEM: up to 2,600 Pa (H₂O)
• Power Requirements and Consumption : 100–240 V; <3.0 kVA
• Environmental requirements : 20°C ±3°C; RH <40%; ESEM: ≤68 dBC; floor spectrum site survey
• Vibration, Magnetic, Noise tolerance : Magnetic fields <100 nT async, <300 nT sync
• Dimensions and Weight: Console: 550 kg