JIB-PS500i

High-performance FIB-SEM for TEM specimen prep, automatic processing, integrated EDS, and large stage

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : SED, UED, iBED
• Optional detectors : STEM, RBED, EDS, EBSD, GIS, SNS, CS
• Cryo : Optional
• FIB: Yes
• STEM : Yes
• STEM parameters: Retractable STEM detector for BF/DF imaging
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS integration, STEM imaging, automatic TEM prep (STEMPLING2), tensile sample milling
• Electron optics : In-lens Schottky Plus field emission gun, power stabilization lens
• Resolution : SEM: 0.7 nm (15 kV), 1.4 nm (1 kV), 1.0 nm (1 kV, BD mode)
• Optical column : Super conical lens in SEM column
• Electron beam resolution : SEM: 0.7–1.4 nm
• Beam current : SEM: 1 pA to 500 nA, FIB: 1 pA to 100 nA
• Accelerating voltage : SEM: 0.01–30 kV, FIB: 0.5–30 kV
• Image parameters : SE, BF/DF STEM, BE, Live 3D, SIM, EDS maps
• Magnification : SEM: ×50 to ×1,000,000 (STD), ×1,000 to ×1,000,000 (UHR), ×10 to ×19,000 (LDF); FIB: ×50 to ×300,000
• Chamber : Large chamber with 5-axis full eucentric stage
• Camera details : Chamber scope, SNS camera, multiple image overlays
• Stage parameters : X: 130 mm, Y: 130 mm, Z: 1.0–40 mm, Tilt: –40° to +93°, Rotation: 360°
• Holder Types : Double tilt holder, TEM linkage, tensile test specimen holder
• Sample size: Up to 150 mm dia., 80 mm height
• Cooling system : Water: 2.6–3.05 L/min, 0.2–0.6 MPa; Nitrogen: 0.45–0.55 MPa
• Vacuum system : TMP + Rotary Pump, automatic
• Power Requirements and Consumption : Single phase 200 V ±10%, 50/60 Hz, 8 kVA (normal approx. 1.8 kVA)
• Environmental requirements : Humidity ≤60%, temp stability required, min room: 3,500×3,000 mm, height ≥2,300 mm
• Dimensions and Weight: Footprint: 3,500 mm or more