Genesis-2020

Medium-sized SEM with motorized stage, high vacuum mode

• Status: Active
• Country: USA
• Electron gun type : W Thermionic source
• Standard detectors : SE Detector (ET-type)
• Optional detectors : EBSD, EDS, WDS, CL, Chamber Camera, LaB6 / CeB6 upgrade, 3D Imaging, Raman Spectroscopy, E-beam Lithography
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EBSD, EDS, WDS, CL, Raman Spectroscopy, E-beam Lithography
• Resolution : 3.0 nm (SE Image)
• Electron beam resolution : 3.0 nm
• Accelerating voltage : 200 V – 30 kV
• Image parameters : Dynamic Focus, Point & Line Scan, Tilt Compensation
• Magnification : ×10 – ×300,000
• Stage parameters : 5-axis Motorized: X: 90 mm, Y: 60 mm, Z: 5–60 mm, Tilt: –20°~90°, Rotation: 360°
• Sample size: Horizontal: 150 mm, Vertical: 60 mm
• Vacuum system : High Vacuum only (<9×10⁻³ Pa)
• Power Requirements and Consumption : 100–240 VAC, 50/60 Hz, 1 kVA
• Dimensions and Weight: Main System: 600(W) × 623(D) × 1350(H) mm, 130 kg; Rotary Pump: 454(W) × 134(D) × 121(H) mm, 22 kg