JSM-IT810

Schottky FE-SEM with in-lens Schottky Plus gun for high current and high resolution. Offers beam deceleration mode and automatic imaging workflows. Supports Live 3D, EBSD, SXES, and EDS integration.

• Status: Active
• Country: Japan
• Electron gun type : Cold FEG
• Standard detectors : SED, UED, BED, EDS
• Optional detectors : USD, UID, UHD, SBED, VBED, TED, SXES, EBSD
• Cryo : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, SXES, EBSD, TED, Phase Analysis
• Electron optics : In-lens Schottky Plus electron gun; aperture angle control lens; hybrid, super hybrid, or semi-in-lens objective lens
• Resolution : HL: 0.7 nm (20 kV), 1.3 nm (1 kV); SHL: 0.6 nm (15 kV), 1.1 nm (1 kV); SIL: 0.5 nm (15 kV), 0.7 nm (1 kV)
• Optical column : Hybrid, Super Hybrid, or Semi-In-Lens objective lens columns with ACL
• Beam current : HL: 300 nA (30 kV); SHL: 500 nA (30 kV); SIL: 300 nA (30 kV)
• Accelerating voltage : 0.01 to 30 kV
• Image parameters : JPEG, TIFF; sizes up to 5120×3840
• Magnification : ×10 to ×2,000,000 (photo); ×27 to ×5,480,000 (display)
• Chamber : Multipurpose chamber with attachment ports
• Camera details : Optional chamber scope
• Stage parameters : Computer-controlled 5-axis; eucentric; up to 140×80 mm travel
• Holder Types : Cryo, heating, tensile, rotation, multi-specimen holders (options)
• Sample size: Up to 200 mm diameter × 55 mm height (Type 2 stage)
• Cooling system : Optional cooling stage
• Vacuum system : SIP ×2, TMP, RP ×1
• Power Requirements and Consumption : Single phase 100 V, 50/60 Hz, 3 kVA
• Environmental requirements : Temp: 20 ±5°C; Humidity: 30–60%; Noise: 70 dB or less; Stray AC magnetic field: 0.3 μT or less
• Vibration, Magnetic, Noise tolerance : Stray AC magnetic field: ≤0.3 μT
• Dimensions and Weight: Column unit: 780×1000×1620 mm, 650 kg