SEM3300

Advanced tungsten SEM with high vacuum performance, wide FOV, and up to 1,000,000× magnification

• Status: Active
• Country: China
• Electron gun type : W Thermionic source
• Standard detectors : ET detector, BSE detector
• Optional detectors : STEM, EDS, EBSD
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, STEM
• Electron optics : Magnetic/electrostatic lens with large chamber and stage options
• Resolution : 2.0 nm @ 30 kV (SE), 3.0 nm @ 3 kV (SE), 3.0 nm @ 30 kV (BSE), 5.0 nm @ 3 kV (BSE)
• Electron beam resolution : 2.0–5.0 nm depending on voltage and detector
• Accelerating voltage : 200 V – 30 kV
• Image parameters : Auto image, drift correction, real-time filtering
• Magnification : 10× – 1,000,000×
• Chamber : Large chamber with up to 16 accessory ports
• Camera details : Dual camera (navigation and chamber view)
• Stage parameters : 5-axis: X/Y = 110 mm, Z = 50 mm, Tilt = –10° to +90°, Rotation = 360°
• Holder Types : Multi-specimen stub holder
• Vacuum system : High and low vacuum modes