SU3800/SU3900

All-in-one Schottky SEM. High-resolution imaging with large specimen capacity and optional VP mode. Designed for ease of use with 5-axis stage.

All-in-one Schottky SEM. High-resolution imaging with large specimen capacity and optional VP mode. Designed for ease of use with 5-axis stage.

Status: Active
Country: Japan
Electron gun type : Schottky FEG
Standard detectors : SE, BSE
Optional detectors : UVD, EDS, EBSD
Cryo : Optional
STEM : Optional
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, 3D measurement, Report Creator
Electron optics : ZrO/W Schottky emitter, VP mode optional
Resolution : 15 kV: 3.0 nm; 1 kV: 4.0 nm (SU3900)
Electron beam resolution : 3.0–4.0 nm
Beam current : Max. 150 nA
Accelerating voltage : 0.3–30 kV
Image parameters : SE, BSE, MIX, Shadow, TOPO, 3D
Magnification : 10×–100,000× (photo), 25×–250,000× (display)
Chamber : SU3900: up to Ø300 mm, height 130 mm; SU3800: up to Ø200 mm, height 80 mm
Camera details : 640×480, 1280×960, 2560×1920, 5120×3840 pixels
Stage parameters : 5-axis motor drive, X/Y: 0–150 mm, Z: 3–85 mm, Tilt: –20° to +90°, Rotation: 360°
Holder Types : Multi-specimen holder (optional)
Sample size: SU3900: Ø300 mm, 5 kg; SU3800: Ø200 mm, 2 kg
Cooling system : Optional cooling stage
Vacuum system : Turbo molecular pump, rotary pump
Power Requirements and Consumption : AC 100–240 V, 500 VA
Environmental requirements : 15–30 °C, ≤70% RH
Dimensions and Weight: SU3900: 780×1,060×1,718 mm, 844 kg; SU3800: 780×1,060×1,634 mm, 600 kg