GeminiSEM 300

Field Emission SEM with high-resolution imaging at low voltages. Suitable for large fields of view and biological tissue 3D imaging

• Status: Active
• Country: Germany
• Electron gun type : Schottky FEG
• Standard detectors : Inlens SE detector, Everhart Thornley SE detector, VPSE (with VP option)
• Optional detectors : AsB4, aSTEM, SE2, CL, EDS, EBSD, WDS, BSD, 3DSM
• Cryo : Optional
• STEM : Optional
• STEM parameters: aSTEM with 7-segment transmission detection
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, CL, STEM, WDS, 3DSM, Atlas 5 mapping, 3View, Shuttle & Find correlative microscopy
• Electron optics : Gemini column with electrostatic and magnetic lens system; beam booster technology
• Resolution : 0.8 nm at15 kV, 1.4 nm at1 kV, 1.7 nm at3 kV at30 Pa (VP mode)
• Optical column : Gemini column with electrostatic-magnetic objective lens
• Electron beam resolution : 0.8–1.7 nm depending on voltage and VP mode
• Beam current : 3 pA to 20 nA (up to 100 nA configuration)
• Accelerating voltage : 0.02–30 kV
• Image parameters : High-resolution SE/BSE, 3D surface modeling, STEM imaging, VPSE
• Magnification : 12× to 2,000,000×
• Camera details : Frame Store up to 32k × 24k pixels
• Stage parameters : 5-axis motorized eucentric stage: X/Y = 130 mm, Z = 50 mm, T = –3° to +70°, R = 360°
• Holder Types : Compatible with AFM, tensile, cryo, heating stages
• Vacuum system : NanoVP option up to 500 Pa; local charge compensation available
• Vibration, Magnetic, Noise tolerance : Beam booster minimizes stray field sensitivity