Apreo ChemiSEM

FEG-SEM with ChemiSEM and EBSD; Trinity in-column detection; Automated high-res imaging

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : Trinity T1, T2, ETD, IR, Nav-Cam
• Optional detectors : DBS, DBS-GAD, STEM 3+, EBSD (TruePix), CL
• Cryo : Optional
• STEM : Optional
• STEM parameters: BF, DF, HADF, HAADF
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, Raman, CL
• Electron optics : Schottky FEG, compound lens, 60° geometry, SmartAlign
• Resolution : 0.7 nm at 30 kV; 0.9 nm at 15 kV; 1.2 nm at 1 kV
• Optical column : Compound electrostatic + magnetic + immersion lens
• Electron beam resolution : 0.7 nm at 30 kV (SE); 0.8 nm at 1 kV (BD)
• Beam current : 1 pA – 50 nA (400 nA optional)
• Accelerating voltage : 200 V – 30 kV
• Image parameters : 25 ns – 25 ms; up to 6144×4096 px
• Chamber : 340 mm width, 12 ports
• Camera details : IR-CCD; Nav-Cam optical camera
• Stage parameters : XY: 110×110 mm; Z: 65 mm; Tilt: –15°/+90°; 500 g / 5 kg max
• Holder Types : 18-stub multipurpose, row-bar, wafer/custom
• Sample size: 122 mm diameter
• Cooling system : Optional CryoCleaner; system chiller
• Vacuum system : Oil-free; TMP (240 l/s); ≤3.5 min evac
• Power Requirements and Consumption : 100–240 V; <3.0 kVA
• Environmental requirements : 20°C ±3°C; RH <80%; <100 nT fields
• Vibration, Magnetic, Noise tolerance : Site survey required; vibration table optional
• Dimensions and Weight: 980 kg column console