SU7000

Ultra-High-Resolution Schottky SEM. Supports simultaneous multi-signal imaging. Designed for variable pressure and large specimens.

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : UD, MD, LD, PD-BSED
• Optional detectors : UVD, EDS, WDS, EBSD, CL, STEM
• Cryo : Optional
• STEM : Optional
• STEM parameters: STEM detector (optional)
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, CL, cryo, STEM
• Electron optics : Newly designed electron optics and detection system
• Resolution : 0.8 nm at15 kV, 0.9 nm at1 kV
• Electron beam resolution : 0.8–0.9 nm
• Beam current : Max. 200 nA
• Accelerating voltage : 0.1–30 kV (0.01 kV step)
• Image parameters : Multi-signal simultaneous imaging, topographic, structural, crystallographic
• Magnification : 20–2,000,000×
• Chamber : Max Ø200 mm, 80 mm height, 18 accessory ports
• Camera details : Camera navigation system (optional)
• Stage parameters : X: 0–135 mm, Y: 0–100 mm, Z: 1.5–40 mm, Tilt: –5° to +70°, Rotation: 360°
• Holder Types : Compatible with various sub-stages
• Sample size: Max Ø200 mm, 80 mm height
• Cooling system : Recirculating cooling water (optional)
• Vacuum system : Dry pump, VP: 5–300 Pa
• Dimensions and Weight: 890×1200×1650 mm, 950 kg (main unit)