Allalin

Hybridized SEM-spectroscopic platform; enables SEM, CL, PL, Pump & Probe, EBIC/EBAC/RCI; designed for static and dynamic modes

• Status: Active
• Country: Switzerland
• Electron gun type : Schottky FEG
• Standard detectors : PMT, UV-Visible CCD camera, InGaAs NIR detector
• Optional detectors : TCSPC, streak camera, EBIC/EBAC, additional spectrometers, nanoprobes
• Cryo : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : CL, TRCL, PL, Raman, EBIC/EBAC/RCI, nanoprobes, ultrafast spectroscopy, hyperspectral imaging
• Electron optics : Achromatic reflective objective; integrated SEM and light microscope with matched focal planes
• Resolution : Electron spot size: down to 3 nm @ 10 kV
• Optical column : Achromatic high NA objective (NA = 0.71, f/0.5)
• Electron beam resolution : 3 nm @ 10 kV
• Beam current : 30 pA to 100 nA
• Accelerating voltage : 2 – 10 keV
• Image parameters : SEM image + hyperspectral/panchromatic map; pixel time: <10 ps (TRCL); up to 4 detectors/system
• Chamber : High-vacuum stainless steel (10⁻⁷ mbar)
• Camera details : High-speed UV-Vis CCD, InGaAs NIR camera, PMT; optional streak, TCSPC
• Stage parameters : 6-DOF nanopositioning stage; 25 mm XY, 3 mm Z, ±3° tilt, ±10° rotation; increment 1 nm
• Holder Types : Nanostage for 1” sample; wafer stage for 150 mm wafers
• Sample size: Up to 50 mm diameter, 1.5 mm thick (nanostage); up to 150 mm wafer (wafer stage)
• Aberration Correction type : Achromatic reflective optics; high NA lens (0.71) for optimized collection
• Cooling system : Optional cryostage (10 K)
• Vacuum system : High vacuum (10⁻⁷ mbar), loadlock for sample entry