EM-40

Table-top SEM with fast 13 fps imaging. NanoStation5 GUI and optimized auto focus. Designed for fast particle analysis and variable pressure modes

• Status: Active
• Country: South Korea
• Electron gun type : W Thermionic source
• Standard detectors : SE, BSE
• Optional detectors : BSE, EDS, EBSD, STEM, Navi CAM
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, STEM
• Electron optics : Motorized 3-axis stage with SE and BSE detection, signal mixing, and auto adjustments
• Resolution : < 5 nm
• Electron beam resolution : < 5 nm
• Accelerating voltage : 1 – 30 kV
• Image parameters : Auto focus in 3 seconds, signal mixing, panorama, auto contrast, brightness, measurement tools
• Magnification : ×20 to ×250,000 (Digital zoom ×1 ~ ×12)
• Stage parameters : X: 40 mm, Y: 40 mm, Z: 40 mm, 3-axis motorized
• Holder Types : Multi-pin stub holder
• Cooling system : Optional (Cool stage)
• Vacuum system : Turbo pump (80L) + Rotary pump (100L); High, Low, Variable pressure modes
• Dimensions and Weight: 315 × 560 × 580 mm, 81.5 kg