LiteScope

AFM-in-SEM for in-situ correlative microscopy. Enables simultaneous SEM and AFM measurements. Offers multimodal analysis including mechanical, electrical, and magnetic properties.

• Status: Active
• Country: China
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : CPEM, C-AFM, KPFM, MFM, EFM, STM, Nanoindentation
• Resolution : XYZ up to 0.2 nm × 0.2 nm × 0.04 nm
• Image parameters : 2D imaging, 3D topography, correlated AFM/SEM imaging
• Magnification : Superb SEM magnification (via nanoindentation module)
• Chamber : SEM chamber compatibility listed
• Camera details : Digital camera with NenoCase for navigation
• Sample size: Max scanned area: 21 mm × 11 mm × 8 mm; weight: 100 g
• Vacuum system : 10⁵ Pa to 10⁻⁵ Pa
• Environmental requirements : +10 °C to +35 °C
• Dimensions and Weight: 118 mm × 84 mm × 35.7–48.4 mm; 460 g