JSM-IT510 InTouchScope

Analytical SEM with automated functions, embedded EDS, large chamber, Live Analysis, Zeromag navigation

• Status: Active
• Country: Japan
• Electron gun type : W Thermionic source
• Standard detectors : Secondary electron (SE), backscattered electron detector (BED) in LV/LA types
• Optional detectors : EDS, WDS, EBSD, LHSED, Load Lock Chamber, 3D analysis software
• Cryo : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Embedded EDS, Live Analysis, Particle Analysis, Asbestos, Gun Shot Residue, Fractography
• Electron optics : High and low vacuum modes, large eucentric stage, 11 ports for simultaneous detectors
• Resolution : 3.0 nm (30 kV) in high vacuum, 4.0 nm (30 kV BED) in low vacuum
• Electron beam resolution : 3.0–4.0 nm depending on vacuum mode
• Beam current : 1 pA to 1 μA
• Accelerating voltage : 0.3 to 30 kV
• Image parameters : SE, BE, compositional image, topographic image, PD image, Live 3D, Montage, Zeromag
• Magnification : Photo: ×5 to ×300,000; Display: ×14 to ×839,724
• Chamber : 200 mm dia. × 75–90 mm tall specimens
• Camera details : Image sizes: 640×480 up to 5120×3840; 23.8” touch monitor
• Stage parameters : X: 125 mm, Y: 100 mm, Z: 80 mm, Tilt: –10° to 90°, Rotation: 360°
• Holder Types : Multiple including cryo and tilting types
• Sample size: Max 200 mm dia. × 75 mm or 90 mm tall
• Vacuum system : Fully automatic, TMP + RP
• Power Requirements and Consumption : Single-phase 100 V AC, 50/60 Hz, 3.0 kVA
• Environmental requirements : 20 ±5 °C, humidity ≤60%, height ≤2,000 m, AC field ≤0.3 μT
• Vibration, Magnetic, Noise tolerance : AC field ≤0.3 μT
• Dimensions and Weight: EOS: 750×1,000×1,470 mm, 405 kg; RP: 530×230×320 mm, 23 kg