JEM-2200FS

200 kV FEG TEM with in-column energy filter, elemental and chemical analysis with zero-loss imaging

• Status: Active
• Country: Japan
• Electron gun type : Extreme FEG
• Standard detectors : CCD camera, BF/DF detectors
• Optional detectors : EDS, STEM BF/HAADF, U-HAADF, STEM image observation system
• Cryo : Optional
• STEM : Yes
• STEM parameters: STEM BF/HAADF detectors, U-HAADF, STEM Cs corrector
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EELS, energy filtering, elemental mapping, chemical-state mapping, 3D tomography
• Electron optics : Four-stage intermediate lenses, two-stage projector lenses, omega-type energy filter
• Resolution : Lattice: 0.1–0.14 nm; Point-to-point: 0.19–0.31 nm
• Optical column : Objective mini lens, omega-type in-column energy filter
• Electron beam resolution : STEM HAADF image: 0.136 nm
• Beam current : Probe current 0.5 nA or more at 1 nm probe
• Accelerating voltage : 160 kV, 200 kV
• Image parameters : Zero-loss filtering, energy-filtered imaging, CBED, HAADF, elemental mapping
• Magnification : MAG mode: ×2,000 to ×1,500,000; SA MAG mode: ×10,000 to ×800,000
• Camera details : High-precision digital CCD camera
• Stage parameters : Piezo-controlled goniometer, X/Y ±25° to ±80° tilt depending on configuration
• Holder Types : Specimen tilting holder, Beryllium tilting, heating, cooling holders
• Aberration Correction type : Optional TEM and STEM Cs correctors co-developed with CEOS
• Cooling system : Flow rate 7.5 L/min, temperature 15–20 °C, pressure 0.2–0.3 MPa
• Vacuum system : Dry pump system, TMP pump, anti-contamination device
• Power Requirements and Consumption : 240/220/200 V, 10 kVA
• Environmental requirements : Temperature 15–25 °C, fluctuation ≤1 °C/h, humidity ≤60%
• Vibration, Magnetic, Noise tolerance : Passive air mount standard, active air mount optional
• Dimensions and Weight: Floor space 5,000×5,400 mm, ceiling height ≥3,200 mm, entrance ≥1,000×2,200 mm